Successful trial production of the first new generation large-size integrated circuit silicon single crystal growth equipment in China
Source: Science and Technology Daily
On December 23, the first domestic new generation large-size integrated circuit silicon single crystal growth equipment jointly developed by Xi'an University of Technology and Xi'an Eswell Equipment Technology Co., Ltd. achieved a successful trial production in Xi'an.
According to the Science and Technology Daily, since 2018, the team of Professor Liu Ding of Xi'an University of Technology and Xi'an Yisiwei have established a close collaboration relationship that promotes the transformation of results and supports the development of the industry. Both parties play their respective technological innovations and market advantages, with the goal of developing a new generation of large-size integrated circuit silicon single crystal growth equipment and core processes, and carry out technological research in response to the requirements of 7-20nm integrated circuit chips.
The silicon single crystal growth complete set of equipment for industrial applications jointly developed by the two parties succeeded in growing high-quality silicon single crystal materials with a diameter of 300 mm and a length of 2100 mm in accordance with the requirements of integrated circuit silicon single crystal materials. It has achieved a major breakthrough in the use of self-developed domestic technology and equipment to successfully pull large-size, high-quality integrated circuit-level silicon single crystal materials and achieve industrialization.
The achievement of this achievement has reached the clear goal of mutual support for basic research and applied research, collaborative cooperation between industry, university and research, and resolution of major national needs, fully embodying the transformation and application of major scientific and technological achievements, and accelerating the resolution of the "stuck neck" problem in my country’s industrial development. Provide a prominent role of strong support.